Electron beam-induced deposition using iron carbonyl and the effects of heat treatment on nanostructure

M. Shimojo, M. Takeguchi, M. Tanaka, K. Mitsuishi, K. Furuya

研究成果: Article査読

44 被引用数 (Scopus)

抄録

Electron beam induced deposition was performed in a scanning electron microscope with a field emission gun using a precursor of iron carbonyl. Nanometer-sized dots and freestanding rods were produced on a carbon film. The nanostructures of as-deposited and heat treated dots and rods were characterized using electron diffraction and electron energy loss spectroscopy in a transmission electron microscope. The as-deposited nano-dots and rods were amorphous containing Fe and C with a small amount of O near the surface. After heat treating at 600°C for 1 h, the oxidized layer disappeared and several iron carbides were formed in the dots. In the freestanding rods, the amorphous deposit separated to α-Fe and Fe7C3 after the heat treatment.

本文言語English
ページ(範囲)1869-1872
ページ数4
ジャーナルApplied Physics A: Materials Science and Processing
79
8
DOI
出版ステータスPublished - 2004 12 1
外部発表はい

ASJC Scopus subject areas

  • 化学 (全般)
  • 材料科学(全般)

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