Electron beam-induced formation of nanosized α-Fe crystals

W. Zhang, M. Shimojo, M. Takeguchi, K. Furuya

研究成果: Article査読

16 被引用数 (Scopus)

抄録

Focused electron beam induced chemical vapor deposition was performed in a scanning electron microscope with a field emission gun using a precursor of iron carbonyl. Due to the longer deposition time and higher gas pressure than those of our previous electron beam-induced deposition method, a new type of deposition occurred. A large amount of nanosized crystals were produced around the focused beam irradiation point on a carbon substrate at room temperature. The nanocrystals were systematically characterized using transmission electron microscopy with electron energy loss spectroscopy (EELS), and were identified to be single crystals of α-Fe.

本文言語English
ページ(範囲)2577-2580
ページ数4
ジャーナルJournal of Materials Science
41
9
DOI
出版ステータスPublished - 2006 5 1
外部発表はい

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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