Electron beam-induced nano-deposition using a transmission electron microscope

Masayuki Shimojo, K. Mitsuishi, M. Tanaka, M. Song, K. Furuya

研究成果: Conference contribution

2 引用 (Scopus)

抄録

Nanometre-sized structures were fabricated by electron beam-induced deposition in a scanning transmission electron microscope. A small amount of metal-organic gases, W(CO)6 and dimethyl acetylacetonato gold, were introduced near a substrate in the chamber of the microscope. The gas was decomposed by the irradiation of focused electron beams and nanometre-sized deposits containing W or Au were produced. Moving the beam position enables us to produce structures with a variety of shapes. High-resolution electron microscopy observation revealed that the structures consisted of nano-crystalline and amorphous parts.

元の言語English
ホスト出版物のタイトルMaterials Science Forum
ページ129-132
ページ数4
480-481
出版物ステータスPublished - 2005
外部発表Yes
イベント1st International Meeting on Applied Physics, APHYS-2003 - Badajoz
継続期間: 2003 10 132003 10 18

出版物シリーズ

名前Materials Science Forum
480-481
ISSN(印刷物)02555476

Other

Other1st International Meeting on Applied Physics, APHYS-2003
Badajoz
期間03/10/1303/10/18

Fingerprint

Electron beams
Electron microscopes
Gases
High resolution electron microscopy
Gold
Microscopes
Deposits
Metals
Irradiation
Crystalline materials
Scanning
Substrates
hexacarbonyltungsten

ASJC Scopus subject areas

  • Materials Science(all)

これを引用

Shimojo, M., Mitsuishi, K., Tanaka, M., Song, M., & Furuya, K. (2005). Electron beam-induced nano-deposition using a transmission electron microscope. : Materials Science Forum (巻 480-481, pp. 129-132). (Materials Science Forum; 巻数 480-481).

Electron beam-induced nano-deposition using a transmission electron microscope. / Shimojo, Masayuki; Mitsuishi, K.; Tanaka, M.; Song, M.; Furuya, K.

Materials Science Forum. 巻 480-481 2005. p. 129-132 (Materials Science Forum; 巻 480-481).

研究成果: Conference contribution

Shimojo, M, Mitsuishi, K, Tanaka, M, Song, M & Furuya, K 2005, Electron beam-induced nano-deposition using a transmission electron microscope. : Materials Science Forum. 巻. 480-481, Materials Science Forum, 巻. 480-481, pp. 129-132, 1st International Meeting on Applied Physics, APHYS-2003, Badajoz, 03/10/13.
Shimojo M, Mitsuishi K, Tanaka M, Song M, Furuya K. Electron beam-induced nano-deposition using a transmission electron microscope. : Materials Science Forum. 巻 480-481. 2005. p. 129-132. (Materials Science Forum).
Shimojo, Masayuki ; Mitsuishi, K. ; Tanaka, M. ; Song, M. ; Furuya, K. / Electron beam-induced nano-deposition using a transmission electron microscope. Materials Science Forum. 巻 480-481 2005. pp. 129-132 (Materials Science Forum).
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Y1 - 2005

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