Electron beam-induced nano-deposition using a transmission electron microscope

M. Shimojo, K. Mitsuishi, M. Tanaka, M. Song, K. Furuya

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

Nanometre-sized structures were fabricated by electron beam-induced deposition in a scanning transmission electron microscope. A small amount of metal-organic gases, W(CO)6 and dimethyl acetylacetonato gold, were introduced near a substrate in the chamber of the microscope. The gas was decomposed by the irradiation of focused electron beams and nanometre-sized deposits containing W or Au were produced. Moving the beam position enables us to produce structures with a variety of shapes. High-resolution electron microscopy observation revealed that the structures consisted of nano-crystalline and amorphous parts.

本文言語English
ホスト出版物のタイトルCross-Disciplinary Applied Research in Materials Science and Technology - Proceedings of the 1st International Meeting on Applied Physics, (APHYS-2003)
ページ129-132
ページ数4
出版ステータスPublished - 2005 12 1
外部発表はい
イベント1st International Meeting on Applied Physics, APHYS-2003 - Badajoz, Spain
継続期間: 2003 10 132003 10 18

出版物シリーズ

名前Materials Science Forum
480-481
ISSN(印刷版)0255-5476

Conference

Conference1st International Meeting on Applied Physics, APHYS-2003
国/地域Spain
CityBadajoz
Period03/10/1303/10/18

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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