Electronic circuit formation on flexible polymer surface processed by 1 MV accelerated hydrogen molecular ions

Hidetaka Hayashi, Wataru Furukawa, Hiroyuki Nishikawa

研究成果: Article


Focused Hydrogen Molecular Beam (FHIB) is an extended technology to utilize accelerated proton to modify material that is Proton Beam Writer (PBW) Watt (1999) [1]. The unique characteristic of these technologies is their capability to modify engineering plastics such as polyester and polyimide of no photosensitivity. These engineering plastics are key materials to compose electronic circuits and devices. Therefore we have been researching to apply these technologies for making functional devices in various applications. FHIB especially H3 + as the accelerating particle is proposed to improve productivity for industrial products Hayashi et al. (2017) [2]. In this report we show FHIB is properly applied to make distributed surface device of low profile that is useful to surface devices working at GHz to THz band applications. These bands are expected to provide the last communication carrier to fulfil the future wireless communication needs Oshima et al. (2017) [3]. We used 1MV accelerator to accelerate H3 + and irradiated on the FPC surface before development process of 5% KOH to make engravings and nanometer sized silver oxide paste was used to fill.

ジャーナルNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
出版物ステータスPublished - 2019 11 15


ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation