Electrostatic Force and Absorption Current of Alumina Electrostatic Chuck

Toshiya Watanabe, Tetsuo Kitabayashi, Chiaki Nakayama

研究成果: Article査読

27 被引用数 (Scopus)

抄録

Electrostatic chucks composed of alumina ceramics doped with 1.3 wt% TiO2 and 3.5 wt% Cr2O3 were fabricated. Evaluations of electrostatic force and absorption charge in various atmospheres were carried out. The electrostatic force in various atmospheres clarified that the electrostatic force is affected not only by the bulk resistance, but also by the surface resistance of the ceramics. Absorption charge measurements revealed that the surface resistance affects the charge distribution of the dielectric layer, and it is deduced that the large electrostatic force of the alumina electrostatic chuck in the vacuum atmosphere is explained by the space charge which concentrates on the dielectric layer and intensity contact potential difference.

本文言語English
ページ(範囲)2145-2150
ページ数6
ジャーナルJapanese Journal of Applied Physics
31
7 R
DOI
出版ステータスPublished - 1992 7

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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