抄録
Electrostatic chucks composed of alumina ceramics doped with 1.3 wt% TiO2 and 3.5 wt% Cr2O3 were fabricated. Evaluations of electrostatic force and absorption charge in various atmospheres were carried out. The electrostatic force in various atmospheres clarified that the electrostatic force is affected not only by the bulk resistance, but also by the surface resistance of the ceramics. Absorption charge measurements revealed that the surface resistance affects the charge distribution of the dielectric layer, and it is deduced that the large electrostatic force of the alumina electrostatic chuck in the vacuum atmosphere is explained by the space charge which concentrates on the dielectric layer and intensity contact potential difference.
本文言語 | English |
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ページ(範囲) | 2145-2150 |
ページ数 | 6 |
ジャーナル | Japanese Journal of Applied Physics |
巻 | 31 |
号 | 7 R |
DOI | |
出版ステータス | Published - 1992 7月 |
外部発表 | はい |
ASJC Scopus subject areas
- 工学(全般)
- 物理学および天文学(全般)