TY - JOUR
T1 - Electrostatic force-induced broadband effect in electret-based vertical vibration energy harvesters using finegrained stainless steel oscillator
AU - Asanuma, H.
AU - Hara, M.
AU - Oguchi, H.
AU - Kuwano, H.
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2014
Y1 - 2014
N2 - We propose a fine-grained stainless-steel as a promising material for a robust oscillator and investigate the dependence of frequency band width, resonance frequency, and output power on initial air gaps in electret-based vertical vibration energy harvesters. Beams of the oscillator showed a shallow side-etched depth less than 10 μm, as well as smooth edges. The oscillator succeeded in travelling over 1-mm displacement without fracture. Also, we found that broader frequency band, as well as lower resonance frequency, can be achieved with reducing the initial air gap, whereas the output power exhibited a peak value at an optimal initial air gap. The results may be attributed to the soft spring effect induced by the stronger electrostatic force. Maximum output power density and FWHM of frequency band width of our harvester are 4.7 μW/cm3 and 14 Hz at initial air gap 0.3 mm and acceleration 4.9 m/s2.
AB - We propose a fine-grained stainless-steel as a promising material for a robust oscillator and investigate the dependence of frequency band width, resonance frequency, and output power on initial air gaps in electret-based vertical vibration energy harvesters. Beams of the oscillator showed a shallow side-etched depth less than 10 μm, as well as smooth edges. The oscillator succeeded in travelling over 1-mm displacement without fracture. Also, we found that broader frequency band, as well as lower resonance frequency, can be achieved with reducing the initial air gap, whereas the output power exhibited a peak value at an optimal initial air gap. The results may be attributed to the soft spring effect induced by the stronger electrostatic force. Maximum output power density and FWHM of frequency band width of our harvester are 4.7 μW/cm3 and 14 Hz at initial air gap 0.3 mm and acceleration 4.9 m/s2.
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U2 - 10.1088/1742-6596/557/1/012124
DO - 10.1088/1742-6596/557/1/012124
M3 - Conference article
AN - SCOPUS:84915749188
VL - 557
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012124
T2 - 14th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications, PowerMEMS 2014
Y2 - 18 November 2014 through 21 November 2014
ER -