A selectively oxidized AlInAs layer with low refractive index can enhance the magneto optic effect and improve the characteristics of optical nonreciprocal devices. We successfully fabricated an optical waveguide with an AlInAs oxide lower cladding layer. The refractive index of the AlInAs oxide was determined to be 2.45 at λ = 1.55 μm. The optical nonreciprocal phase shift of this waveguide was more than twelvefold than that of the magneto optic waveguide with an InP cladding layer.
|ジャーナル||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版ステータス||Published - 2004 2月|
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