Enhancing proton beam writing system with auto scanning software and stage movement

Truong Phi Nguyen, Ryo Teshima, Tadahiro Hasegawa, Hiroyuki Nishikawa

研究成果: Article査読

1 被引用数 (Scopus)

抄録

Proton beam writing (PBW) is known to be a powerful tool with unique advantages for microfabrication. In order to solve remaining problems and bring the PBW technology to a new level of applications, we propose a microfabrication system based on a PBW that makes fabrication of microstructures in an area only a centimeter large possible. We combined XY-stage control and electrostatic scanning to eliminate the area restrictions of our previous PBW system, and included a feature for importing CAD (Computer Aided Design) data which enables faster and more accurate development of complicated structures.

本文言語English
ページ(範囲)12-17
ページ数6
ジャーナルMicroelectronic Engineering
102
DOI
出版ステータスPublished - 2013 2

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 電子工学および電気工学

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