Evaluation of SiO2 thin films prepared by sol-gel method using photoirradiation

S. Maekawa, T. Ohishi

研究成果: Letter

30 引用 (Scopus)

抜粋

SiO2 films were prepared by the sol-gel method using photoirradiation, and the properties microhardness and HF etch rate, etc., were evaluated. The hardness and anti-corrosion in HF of photoirradiated films were superior to films only heated at the same temperature.

元の言語English
ページ(範囲)207-209
ページ数3
ジャーナルJournal of Non-Crystalline Solids
169
発行部数1-2
DOI
出版物ステータスPublished - 1994 3 11
外部発表Yes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry

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