TY - JOUR
T1 - Fabrication and characterization of anatase/rutile-TiO2 thin films by magnetron sputtering
T2 - A review
AU - Tanemura, Sakae
AU - Miao, Lei
AU - Wunderlich, Wilfried
AU - Tanemura, Masaki
AU - Mori, Yukimasa
AU - Toh, Shoichi
AU - Kaneko, Kenji
N1 - Funding Information:
The authors express their thanks to the following collaborators: Dr P. Jin and Dr M.Okada of National Institute of Advanced Industrial Science and Technology in Japan for his assistance in preparing TiO 2 thin films, and Ms A.Terai, Ms Y. Wasai and Dr N. Nabatova-Gabain for their help for elipsometry measurements. This work is partly supported by a grant from the NITECH 21st Century COE Program for Environment-friendly Ceramics and Tokai Foundation, Japan (under the contract 03-No. 6).
PY - 2005/1
Y1 - 2005/1
N2 - This review article summarizes briefly some important achievements of our recent reserach on anatase and/or rutile TiO2 thin films, fabricated by helicon RF magnetron sputtering, with good crystal quality and high density, and gives the-state-of-the-art of the knowledge on systematic interrelationship for fabrication conditions, crystal structure, composition, optical properties, and bactericidal abilities, and on the effective surface treatment to improve the optical reactivity of the obtained films.
AB - This review article summarizes briefly some important achievements of our recent reserach on anatase and/or rutile TiO2 thin films, fabricated by helicon RF magnetron sputtering, with good crystal quality and high density, and gives the-state-of-the-art of the knowledge on systematic interrelationship for fabrication conditions, crystal structure, composition, optical properties, and bactericidal abilities, and on the effective surface treatment to improve the optical reactivity of the obtained films.
KW - Bactericidal ability
KW - Epitaxial growth
KW - Helicon RF magnetron sputtering
KW - Optical properties
KW - Surface treatment
KW - TiO thin film
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U2 - 10.1016/j.stam.2004.06.003
DO - 10.1016/j.stam.2004.06.003
M3 - Review article
AN - SCOPUS:14544287681
SN - 1468-6996
VL - 6
SP - 11
EP - 17
JO - Science and Technology of Advanced Materials
JF - Science and Technology of Advanced Materials
IS - 1
ER -