Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls

Masayuki Shimojo, M. Takeguchi, K. Mitsuishi, M. Tanaka, K. Furuya

研究成果: Conference contribution

抄録

The characterization of nano-deposits produced using an electron beam induced deposition (EBID) technique with iron carbonyl, and the effects of heat treatment on the nanodeposits were investigated. A field emission gun scanning electron microscope (SEM, JEOL JSM-7800UHV) was used for EBID. The gas pressure in the nanodots chamber was about 7×10-5 Pa during the deposition investigations. The nanostructure and compositions were analyzed using a transmission electron microscope operated at an accelerating voltage of 200 kV with an electron energy loss spectrometer (EELS).

元の言語English
ホスト出版物のタイトルDigest of Papers - Microprocesses and Nanotechnology 2004
ページ144-145
ページ数2
出版物ステータスPublished - 2004
外部発表Yes
イベント2004 International Microprocesses and Nanotechnology Conference - Osaka
継続期間: 2004 10 262004 10 29

Other

Other2004 International Microprocesses and Nanotechnology Conference
Osaka
期間04/10/2604/10/29

Fingerprint

Electron beams
Fabrication
Electron microscopes
Metals
Field emission
Spectrometers
Nanostructures
Energy dissipation
Deposits
Heat treatment
Iron
Scanning
Scanning electron microscopy
Electrons
Electric potential
Chemical analysis
Gases

ASJC Scopus subject areas

  • Engineering(all)

これを引用

Shimojo, M., Takeguchi, M., Mitsuishi, K., Tanaka, M., & Furuya, K. (2004). Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls. : Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 144-145)

Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls. / Shimojo, Masayuki; Takeguchi, M.; Mitsuishi, K.; Tanaka, M.; Furuya, K.

Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 144-145.

研究成果: Conference contribution

Shimojo, M, Takeguchi, M, Mitsuishi, K, Tanaka, M & Furuya, K 2004, Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls. : Digest of Papers - Microprocesses and Nanotechnology 2004. pp. 144-145, 2004 International Microprocesses and Nanotechnology Conference, Osaka, 04/10/26.
Shimojo M, Takeguchi M, Mitsuishi K, Tanaka M, Furuya K. Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls. : Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 144-145
Shimojo, Masayuki ; Takeguchi, M. ; Mitsuishi, K. ; Tanaka, M. ; Furuya, K. / Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls. Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. pp. 144-145
@inproceedings{ab1eb9e778104005a4af7fef415f1f9c,
title = "Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls",
abstract = "The characterization of nano-deposits produced using an electron beam induced deposition (EBID) technique with iron carbonyl, and the effects of heat treatment on the nanodeposits were investigated. A field emission gun scanning electron microscope (SEM, JEOL JSM-7800UHV) was used for EBID. The gas pressure in the nanodots chamber was about 7×10-5 Pa during the deposition investigations. The nanostructure and compositions were analyzed using a transmission electron microscope operated at an accelerating voltage of 200 kV with an electron energy loss spectrometer (EELS).",
author = "Masayuki Shimojo and M. Takeguchi and K. Mitsuishi and M. Tanaka and K. Furuya",
year = "2004",
language = "English",
isbn = "4990247205",
pages = "144--145",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2004",

}

TY - GEN

T1 - Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls

AU - Shimojo, Masayuki

AU - Takeguchi, M.

AU - Mitsuishi, K.

AU - Tanaka, M.

AU - Furuya, K.

PY - 2004

Y1 - 2004

N2 - The characterization of nano-deposits produced using an electron beam induced deposition (EBID) technique with iron carbonyl, and the effects of heat treatment on the nanodeposits were investigated. A field emission gun scanning electron microscope (SEM, JEOL JSM-7800UHV) was used for EBID. The gas pressure in the nanodots chamber was about 7×10-5 Pa during the deposition investigations. The nanostructure and compositions were analyzed using a transmission electron microscope operated at an accelerating voltage of 200 kV with an electron energy loss spectrometer (EELS).

AB - The characterization of nano-deposits produced using an electron beam induced deposition (EBID) technique with iron carbonyl, and the effects of heat treatment on the nanodeposits were investigated. A field emission gun scanning electron microscope (SEM, JEOL JSM-7800UHV) was used for EBID. The gas pressure in the nanodots chamber was about 7×10-5 Pa during the deposition investigations. The nanostructure and compositions were analyzed using a transmission electron microscope operated at an accelerating voltage of 200 kV with an electron energy loss spectrometer (EELS).

UR - http://www.scopus.com/inward/record.url?scp=23244466881&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=23244466881&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:23244466881

SN - 4990247205

SP - 144

EP - 145

BT - Digest of Papers - Microprocesses and Nanotechnology 2004

ER -