Fabrication and characterization of ultra-water-repellent alumina-silica composite films

Takahiro Ishizaki, Nagahiro Saito, Yasushi Inoue, Makoto Bekke, Osamu Takai

研究成果: Article査読

34 被引用数 (Scopus)

抄録

Ultra-water-repellent (UWR) films were prepared by microwave plasma-enhanced chemical vapour deposition using trimethylmethoxysilane and aluminium (III) diisopropoxide ethylacetoacetate (ADE) as raw materials. The film was mainly composed of silica and alumina and was apparently transparent. The film thickness was approximately 500 nm. The sample surface was treated with an organosilane in order to introduce hydrophobic groups. The hydrophobic modification led to a water contact angle of more than 150°, whose value corresponds to the UWR surface. The hardness of film with an optimized Al content was significantly improved compared with that without Al. The maximum hardness was 1.71 GPa. In consequence, we successfully prepared an UWR film in the silica-alumina system.

本文言語English
論文番号014
ページ(範囲)192-197
ページ数6
ジャーナルJournal of Physics D: Applied Physics
40
1
DOI
出版ステータスPublished - 2007 1月 7
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 音響学および超音波学
  • 表面、皮膜および薄膜

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