Fabrication and direct transmission measurement of high-aspect-ratio two-dimensional silicon-based photonic crystal chips

Ying Xu, Hong Bo Sun, Jia Yu Ye, Shigeki Matsuo, Hiroaki Misawa

研究成果: Article査読

42 被引用数 (Scopus)

抄録

We report the fabrication and characterization of two-dimensional silicon-based photonic crystal (PhC) structures realized by a combination of electron-beam lithography and dry-etching techniques. PhCs of various lattices with very high aspect ratios up to 20 have been achieved, and PhC chips were prepared by standard semiconductor technologies, including thinning and cleaving. The chips consisting of high-aspect-ratio air rods or dielectric rods permit a direct transmission measurement, and they were observed to demonstrate pronounced photonic bandgap effects. Several photonic bandgap behaviors were identified by comparing transmission with reflection and experimental results with numerical results, and by considering detecting beam property.

本文言語English
ページ(範囲)1084-1091
ページ数8
ジャーナルJournal of the Optical Society of America B: Optical Physics
18
8
DOI
出版ステータスPublished - 2001 8
外部発表はい

ASJC Scopus subject areas

  • 統計物理学および非線形物理学
  • 原子分子物理学および光学

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