Fabrication and Electrical Properties of Nanocarbon/Metal Hybrid Interconnects

M.Takagi M.Takagi, T. Wakui, Y. Karasawa, S. Kuwahara, N. Sakuma, A. Kajita, T. Sakai, K. Ueno

研究成果: Article › 査読

本文言語	English
ページ（範囲）	134-135
ジャーナル	Entended Abstracts of Advanced Metallization Conference 2011: 21st Asian Session
出版ステータス	Published - 2011 9月 14

引用スタイル

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title = "Fabrication and Electrical Properties of Nanocarbon/Metal Hybrid Interconnects",

author = "M.Takagi M.Takagi and T. Wakui and Y. Karasawa and S. Kuwahara and N. Sakuma and A. Kajita and T. Sakai and K. Ueno",

year = "2011",

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language = "English",

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journal = "Entended Abstracts of Advanced Metallization Conference 2011: 21st Asian Session",

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AU - M.Takagi, M.Takagi

AU - Wakui, T.

AU - Karasawa, Y.

AU - Kuwahara, S.

AU - Sakuma, N.

AU - Kajita, A.

AU - Sakai, T.

AU - Ueno, K.

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Y1 - 2011/9/14

M3 - Article

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JO - Entended Abstracts of Advanced Metallization Conference 2011: 21st Asian Session

JF - Entended Abstracts of Advanced Metallization Conference 2011: 21st Asian Session

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