Fabrication and evaluation of 3D-DEP devices utilized by proton beam writing

Y. Furuta, H. Nishikawa, T. Satoh, Y. Ishii, T. Kamiya, R. Nakao, S. Uchida

研究成果: Article査読

本文言語English
ジャーナル34th International Conference on Micro and Nano Engineering (15 -18 September 2008 Athens - Greece)
出版ステータスPublished - 2008 9 1

引用スタイル