Fabrication and properties of Bi2SiO5 thin films for MFIS structures

M. Yamaguchi, K. Hiraki, T. Homma, T. Nagatomo, Y. Masuda

研究成果: Paper査読

5 被引用数 (Scopus)


Bismuth silicate (Bi2SiO5) thin films expected as the intermediate buffer layer for metal-ferroelectric-insulator-semiconductor (MFIS) structures were fabricated on Si(100) wafers by rf magnetron sputtering. It was confirmed that the resultant films were single phases Bi2SiO5 with c-axis dominant orientated. The relative dielectric constant was estimated to be approximately 14. The leakage current density of the metal-insulator-semiconductor (MIS) diode is on the order of 10-10 A cm-2, under the applied electric field of less than 350 kV cm-1. In the capacitance-voltage (C-V) characteristics measurement results, it is worth nothing that hysteresis is hardly observed. The interface trap density at the midgap is estimated to be approximately 6×1012 cm-2 eV-1. The numerical evaluation results indicate that the MFIS capacitor can be reversed at a low applied voltage.

出版ステータスPublished - 2000
イベント12th IEEE International Symposium on Applications of Ferroelectrics - Honolulu, HI, United States
継続期間: 2000 7 212000 8 2


Conference12th IEEE International Symposium on Applications of Ferroelectrics
国/地域United States
CityHonolulu, HI

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学


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