We succeeded in fabricating crystalline alpha-iron nanostructures with desired shapes. Electron-beam-induced chemical vapor deposition with iron carbonyl gas, Fe(CO)5, was carried out at room temperature in a field-emission-gun scanning electron microscope to fabricate nanodots, nanorods and square frames. The as-deposited structures exhibited an amorphous phase containing iron, carbon and oxygen in their entire volumes and iron oxide nanocrystals existed near their surfaces. Postdeposition heat treatment at about 600°C resulted in the formation of crystalline alpha-iron and iron carbide phases in their structures, while maintaining their shapes. Quantitative elemental analyses using electron energy loss spectroscopy suggested that the original as-deposited iron-to-carbon compositional ratio is crucial in determining the stoichiometry of the produced structures after the heat treatment.
|ジャーナル||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版ステータス||Published - 2005 7 26|
ASJC Scopus subject areas
- Physics and Astronomy(all)