Fabrication of Bi4Ti3O12 thin films using alcohol related solutions by micro liquid delivery systems

Masaki Yamaguchi, Asa Yamamoto, Yoichiro Masuda

研究成果: Conference contribution

抄録

We fabricate the bismut titanate (Bi4Ti3O 12) thin films used an alcohol related solutions which dissolved Bi(OtC5H11)3 and Ti[OCH(CH3) 2]4 in C2H5OC2H 4OH for micro liquid delivery systems such as ink-jet printing method. These films fired at 750 degree Celsius into pure oxygen including 1.2% ozone atmosphere, exhibits plate-like grains, and highly c-axis oriented. Furthermore, its films shows good ferroelectric properties, remanent polarization and coercive field was 2.6μC/cm2 and 36kV/cm, respectively, and shows fatigue properties up to 108 times. Additionally, we examined the pattern formation on Pt substrate with hydrophilic treatment by micro liquid delivery systems. Drawn patterns on hydrophilic treated substrate surface shows relatively flat cross sectional structures. Therefore, we think that the micro liquid delivery system and hydrophile treatment of substrate surface is effectively to the thin film formation.

本文言語English
ホスト出版物のタイトル2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
ページ126-129
ページ数4
DOI
出版ステータスPublished - 2007
イベント2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF - Nara-city, Japan
継続期間: 2007 5 272007 5 31

出版物シリーズ

名前IEEE International Symposium on Applications of Ferroelectrics

Conference

Conference2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
国/地域Japan
CityNara-city
Period07/5/2707/5/31

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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