Fabrication of BIT thick films patterned by proton beam writing

Masaki Yamaguchi, Kazuki Watanabe, Hiroyuki Nishikawa, Yoichiro Masuda

研究成果: Article

1 引用 (Scopus)

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In this study, we fabricated thick films with polyvinylpyrrolidone (PVP) added to bismuth titanate (Bi4Ti3O12) to form a lead-free ferroelectric material. We examined the direct patterning of these materials by using proton-beam irradiation. When 50% PVP was added to the organic source solution, the c-axis orientation was promoted and cracks were suppressed due to stress relaxation. In addition, a dot and an arbitrary-shape micro-pattern were formed on bismuth-titanate thick film by micromachining using a proton beam.

元の言語English
ページ(範囲)88-91
ページ数4
ジャーナルJournal of the Korean Physical Society
71
発行部数2
DOI
出版物ステータスPublished - 2017 7 1

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

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