Fabrication of crystalline Ge thin films by co-deposition of Au and Ge at low substrate temperatures (>200 °c) without post annealing

Takatoshi Sugiyama, Naoya Mishiba, Masao Kamiko, Kentaro Kyuno

研究成果: Article

1 引用 (Scopus)

抜粋

Crystalline Ge thin films with (111) orientation are obtained by co-depositing Au and Ge on a substrate heated to >170 °C, with Au segregating at the film surface, which is desirable for selective etching. Although in the conventional metal-induced crystallization method using Au as a catalyst, a bilayer of Au and amorphous Ge layers have to be annealed for Ge to crystallize, the film in this study is already crystalline in the as-deposited state. The effective crystallization process implies the existence of a supercooled liquid alloy layer at the growth front.

元の言語English
記事番号095501
ジャーナルApplied Physics Express
9
発行部数9
DOI
出版物ステータスPublished - 2016 9

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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