Fabrication of curved PDMS microstructures on silica glass by proton beam writing aimed for micro-lens arrays on transparent substrates

Engineering & Materials Science

• Proton beams 100%
• Fused silica 86%
• Polydimethylsiloxane 77%
• Lenses 62%
• Fabrication 45%
• Substrates 43%
• Microstructure 41%
• Sputtering 11%
• Silicone rubber 10%
• Biocompatibility 10%
• Protons 10%
• Microfluidics 9%
• Transparency 9%
• Materials properties 7%
• Silicon 6%

Physics & Astronomy

• silica glass 70%
• proton beams 62%
• lenses 45%
• fabrication 37%
• microstructure 36%
• fluence 14%
• silicone rubber 11%
• transparence 11%
• biocompatibility 10%
• curved surfaces 10%
• sensitivity 10%
• thick films 8%
• charging 8%
• flexibility 7%
• sputtering 6%
• protons 5%
• silicon 4%