TiO2-organic hybrid dot arrays were produced from TiO 2-organic hybrid films by a multi-beam laser interference technique of femtosecond laser pulses. The hybrid films were prepared from titanium alkoxide and β-diketonate by the sol-gel method. Films were exposed to interference light from femtosecond pulses which have an intensity distribution over the pitch of the order of a micron. The chemical structures of the hybrid film were changed by multi-photon absorption from femtosecond pulses, and made chemical patterning possible after the development process. The precursor arrays of the TiO2-organic hybrid material were calcined at 450°C. TiO2-organic hybrid dot arrays with a refractive index of 2 were obtained.
|ジャーナル||Applied Physics A: Materials Science and Processing|
|出版ステータス||Published - 2004 8 1|
ASJC Scopus subject areas
- Materials Science(all)