Fabrication of fine-pitch TiO2-organic hybrid dot arrays using multi-photon absorption of femtosecond pulses

H. Segawa, S. Matsuo, H. Misawa

研究成果: Article

15 引用 (Scopus)


TiO2-organic hybrid dot arrays were produced from TiO 2-organic hybrid films by a multi-beam laser interference technique of femtosecond laser pulses. The hybrid films were prepared from titanium alkoxide and β-diketonate by the sol-gel method. Films were exposed to interference light from femtosecond pulses which have an intensity distribution over the pitch of the order of a micron. The chemical structures of the hybrid film were changed by multi-photon absorption from femtosecond pulses, and made chemical patterning possible after the development process. The precursor arrays of the TiO2-organic hybrid material were calcined at 450°C. TiO2-organic hybrid dot arrays with a refractive index of 2 were obtained.

ジャーナルApplied Physics A: Materials Science and Processing
出版物ステータスPublished - 2004 8 1

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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