Fabrication of flat end mirror etched by focused ion beam for GaN-based blue-green laser diode

Engineering & Materials Science

• Focused ion beams 100%
• Semiconductor lasers 89%
• Mirrors 73%
• Metallorganic chemical vapor deposition 56%
• Fabrication 53%
• Sapphire 47%
• Atomic force microscopy 45%
• Microscopic examination 38%
• Etching 38%
• Ions 33%
• Surface roughness 29%
• Scanning 27%

Physics & Astronomy

• ion beams 55%
• semiconductor lasers 55%
• mirrors 51%
• fabrication 43%
• metalorganic chemical vapor deposition 34%
• sapphire 30%
• surface roughness 30%
• atomic force microscopy 27%
• etching 27%
• microscopy 25%
• scanning 22%
• ions 16%