本文言語 | English |
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ページ(範囲) | 201-202 |
ジャーナル | 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology, Abstracts (France, June 7-9, 2007) |
出版ステータス | Published - 2007 6月 7 |
Fabrication of High-Aspect-Ratio Microstructures by Proton Beam Writing (PBW)
N. Uchiya, Y. Furuta, H. Nishikawa, T. Watanabe, J. Haga, T. Sato, Y. Ishii, T. Kamiya
研究成果: Article › 査読