Fabrication of High-Aspect-Ratio Microstructures by Proton Beam Writing (PBW)

N. Uchiya, Y. Furuta, H. Nishikawa, T. Watanabe, J. Haga, T. Sato, Y. Ishii, T. Kamiya

研究成果: Article

元の言語English
ページ(範囲)201-202
ジャーナル7th International Workshop on High-Aspect-Ratio Micro-Structure Technology, Abstracts (France, June 7-9, 2007)
出版物ステータスPublished - 2007 6 7

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