Fabrication of high-aspect-ratio pillars by proton beam writing and application to DEP-devices
Y. Furuta, N. Uchiya, H. Nishikawa, J. Haga, M. Oikawa, T. Satoh, Y. Ishii, T. Kamiya, R. Nakao, S. Uchida
研究成果: Conference contribution
5
被引用数
(Scopus)