Fabrication of iron oxide nanostructures by electron beam-induced deposition

M. Shimojo, M. Takeguchi, K. Mitsuishi, M. Tanaka, K. Furuya

研究成果: Conference contribution

1 引用 (Scopus)

抄録

Electron beam induced-deposition (EBID) is a promising technique for fabricating nanometer-sized structures in a position- and size-controlled manner. The resolution of EBID is now reaching down to subnanometers. However, the deposits obtained by EBID contain a large amount of carbon. Thus, carbon reduction techniques are needed. In this study, nanostructures, such as nanowires, were fabricated by EBID using an iron pentacarbonyl precursor. Several techniques to reduce carbon were applied, including post-deposition heat-treatments and the modification of precursor. It was found that the post-deposition heat-treatment in air resulted in a formation of Fe 2O3, and that carbon-free Fe3O4 was formed by mixing a small amount of water vapor in the iron pentacarbonyl precursor.

元の言語English
ホスト出版物のタイトルMaterials Science Forum
ページ1101-1104
ページ数4
561-565
エディションPART 2
出版物ステータスPublished - 2007
外部発表Yes
イベント6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6 - Jeju
継続期間: 2007 11 52007 11 9

出版物シリーズ

名前Materials Science Forum
番号PART 2
561-565
ISSN(印刷物)02555476

Other

Other6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
Jeju
期間07/11/507/11/9

Fingerprint

Iron oxides
Electron beams
Nanostructures
Fabrication
Carbon
Heat treatment
Iron
Steam
Water vapor
Nanowires
ferric oxide
Deposits
Air

ASJC Scopus subject areas

  • Materials Science(all)

これを引用

Shimojo, M., Takeguchi, M., Mitsuishi, K., Tanaka, M., & Furuya, K. (2007). Fabrication of iron oxide nanostructures by electron beam-induced deposition. : Materials Science Forum (PART 2 版, 巻 561-565, pp. 1101-1104). (Materials Science Forum; 巻数 561-565, 番号 PART 2).

Fabrication of iron oxide nanostructures by electron beam-induced deposition. / Shimojo, M.; Takeguchi, M.; Mitsuishi, K.; Tanaka, M.; Furuya, K.

Materials Science Forum. 巻 561-565 PART 2. 編 2007. p. 1101-1104 (Materials Science Forum; 巻 561-565, 番号 PART 2).

研究成果: Conference contribution

Shimojo, M, Takeguchi, M, Mitsuishi, K, Tanaka, M & Furuya, K 2007, Fabrication of iron oxide nanostructures by electron beam-induced deposition. : Materials Science Forum. PART 2 Edn, 巻. 561-565, Materials Science Forum, 番号 PART 2, 巻. 561-565, pp. 1101-1104, 6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6, Jeju, 07/11/5.
Shimojo M, Takeguchi M, Mitsuishi K, Tanaka M, Furuya K. Fabrication of iron oxide nanostructures by electron beam-induced deposition. : Materials Science Forum. PART 2 版 巻 561-565. 2007. p. 1101-1104. (Materials Science Forum; PART 2).
Shimojo, M. ; Takeguchi, M. ; Mitsuishi, K. ; Tanaka, M. ; Furuya, K. / Fabrication of iron oxide nanostructures by electron beam-induced deposition. Materials Science Forum. 巻 561-565 PART 2. 版 2007. pp. 1101-1104 (Materials Science Forum; PART 2).
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