Fabrication of iron oxide nanostructures by electron beam-induced deposition

M. Shimojo, M. Takeguchi, K. Mitsuishi, M. Tanaka, K. Furuya

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Electron beam induced-deposition (EBID) is a promising technique for fabricating nanometer-sized structures in a position- and size-controlled manner. The resolution of EBID is now reaching down to subnanometers. However, the deposits obtained by EBID contain a large amount of carbon. Thus, carbon reduction techniques are needed. In this study, nanostructures, such as nanowires, were fabricated by EBID using an iron pentacarbonyl precursor. Several techniques to reduce carbon were applied, including post-deposition heat-treatments and the modification of precursor. It was found that the post-deposition heat-treatment in air resulted in a formation of Fe 2O3, and that carbon-free Fe3O4 was formed by mixing a small amount of water vapor in the iron pentacarbonyl precursor.

本文言語English
ホスト出版物のタイトルSelected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
出版社Trans Tech Publications Ltd
ページ1101-1104
ページ数4
PART 2
ISBN(印刷版)0878494626, 9780878494620
DOI
出版ステータスPublished - 2007 1 1
外部発表はい
イベント6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6 - Jeju, Korea, Republic of
継続期間: 2007 11 52007 11 9

出版物シリーズ

名前Materials Science Forum
番号PART 2
561-565
ISSN(印刷版)0255-5476

Conference

Conference6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
CountryKorea, Republic of
CityJeju
Period07/11/507/11/9

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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