Fabrication of magnetic nanostructures by electron beam induced deposition

Masaki Takeguchi, Masayuki Shimojo

研究成果: Chapter

抄録

Electron beam induced deposition (EBID) is one of the promising techniques for fabrication of nanometer-sized structures with desired shapes at desired positions. Constitution of the nanostructures formed by EBID can be controlled by choosing the type of precursor element. This chapter describes the recent progress of fabrication of magnetic nanostructures using EBID.

元の言語English
ホスト出版物のタイトルNanomagnetism and Spintronics: Fabrication, Materials, Characterization and Applications
出版者World Scientific Publishing Co.
ページ45-61
ページ数17
ISBN(印刷物)9789814273060, 9789814273053
DOI
出版物ステータスPublished - 2010 1 1
外部発表Yes

Fingerprint

Electron beams
Nanostructures
electron beams
Fabrication
fabrication
constitution

ASJC Scopus subject areas

  • Biochemistry, Genetics and Molecular Biology(all)
  • Engineering(all)
  • Physics and Astronomy(all)

これを引用

Takeguchi, M., & Shimojo, M. (2010). Fabrication of magnetic nanostructures by electron beam induced deposition. : Nanomagnetism and Spintronics: Fabrication, Materials, Characterization and Applications (pp. 45-61). World Scientific Publishing Co.. https://doi.org/10.1142/9789814273060_0003

Fabrication of magnetic nanostructures by electron beam induced deposition. / Takeguchi, Masaki; Shimojo, Masayuki.

Nanomagnetism and Spintronics: Fabrication, Materials, Characterization and Applications. World Scientific Publishing Co., 2010. p. 45-61.

研究成果: Chapter

Takeguchi, M & Shimojo, M 2010, Fabrication of magnetic nanostructures by electron beam induced deposition. : Nanomagnetism and Spintronics: Fabrication, Materials, Characterization and Applications. World Scientific Publishing Co., pp. 45-61. https://doi.org/10.1142/9789814273060_0003
Takeguchi M, Shimojo M. Fabrication of magnetic nanostructures by electron beam induced deposition. : Nanomagnetism and Spintronics: Fabrication, Materials, Characterization and Applications. World Scientific Publishing Co. 2010. p. 45-61 https://doi.org/10.1142/9789814273060_0003
Takeguchi, Masaki ; Shimojo, Masayuki. / Fabrication of magnetic nanostructures by electron beam induced deposition. Nanomagnetism and Spintronics: Fabrication, Materials, Characterization and Applications. World Scientific Publishing Co., 2010. pp. 45-61
@inbook{30e06f5fe76b47b897dca990691677ea,
title = "Fabrication of magnetic nanostructures by electron beam induced deposition",
abstract = "Electron beam induced deposition (EBID) is one of the promising techniques for fabrication of nanometer-sized structures with desired shapes at desired positions. Constitution of the nanostructures formed by EBID can be controlled by choosing the type of precursor element. This chapter describes the recent progress of fabrication of magnetic nanostructures using EBID.",
author = "Masaki Takeguchi and Masayuki Shimojo",
year = "2010",
month = "1",
day = "1",
doi = "10.1142/9789814273060_0003",
language = "English",
isbn = "9789814273060",
pages = "45--61",
booktitle = "Nanomagnetism and Spintronics: Fabrication, Materials, Characterization and Applications",
publisher = "World Scientific Publishing Co.",

}

TY - CHAP

T1 - Fabrication of magnetic nanostructures by electron beam induced deposition

AU - Takeguchi, Masaki

AU - Shimojo, Masayuki

PY - 2010/1/1

Y1 - 2010/1/1

N2 - Electron beam induced deposition (EBID) is one of the promising techniques for fabrication of nanometer-sized structures with desired shapes at desired positions. Constitution of the nanostructures formed by EBID can be controlled by choosing the type of precursor element. This chapter describes the recent progress of fabrication of magnetic nanostructures using EBID.

AB - Electron beam induced deposition (EBID) is one of the promising techniques for fabrication of nanometer-sized structures with desired shapes at desired positions. Constitution of the nanostructures formed by EBID can be controlled by choosing the type of precursor element. This chapter describes the recent progress of fabrication of magnetic nanostructures using EBID.

UR - http://www.scopus.com/inward/record.url?scp=84967551378&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84967551378&partnerID=8YFLogxK

U2 - 10.1142/9789814273060_0003

DO - 10.1142/9789814273060_0003

M3 - Chapter

AN - SCOPUS:84967551378

SN - 9789814273060

SN - 9789814273053

SP - 45

EP - 61

BT - Nanomagnetism and Spintronics: Fabrication, Materials, Characterization and Applications

PB - World Scientific Publishing Co.

ER -