Fabrication of magnetic nanostructures by electron beam induced deposition

Masaki Takeguchi, Masayuki Shimojo

研究成果: Chapter

抜粋

Electron beam induced deposition (EBID) is one of the promising techniques for fabrication of nanometer-sized structures with desired shapes at desired positions. Constitution of the nanostructures formed by EBID can be controlled by choosing the type of precursor element. This chapter describes the recent progress of fabrication of magnetic nanostructures using EBID.

元の言語English
ホスト出版物のタイトルNanomagnetism and Spintronics: Fabrication, Materials, Characterization and Applications
出版者World Scientific Publishing Co.
ページ45-61
ページ数17
ISBN(印刷物)9789814273060, 9789814273053
DOI
出版物ステータスPublished - 2010 1 1
外部発表Yes

ASJC Scopus subject areas

  • Biochemistry, Genetics and Molecular Biology(all)
  • Engineering(all)
  • Physics and Astronomy(all)

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  • これを引用

    Takeguchi, M., & Shimojo, M. (2010). Fabrication of magnetic nanostructures by electron beam induced deposition. : Nanomagnetism and Spintronics: Fabrication, Materials, Characterization and Applications (pp. 45-61). World Scientific Publishing Co.. https://doi.org/10.1142/9789814273060_0003