Electron beam induced deposition (EBID) is one of the promising techniques for fabrication of nanometer-sized structures with desired shapes at desired positions. Constitution of the nanostructures formed by EBID can be controlled by choosing the type of precursor element. This chapter describes the recent progress of fabrication of magnetic nanostructures using EBID.
ASJC Scopus subject areas
- Biochemistry, Genetics and Molecular Biology(all)
- Physics and Astronomy(all)