TY - JOUR
T1 - Fabrication of magnetic nanostructures using electron beam induced chemical vapour deposition
AU - Takeguchi, Masaki
AU - Shimojo, Masayuki
AU - Furuya, Kazuo
PY - 2005/8/1
Y1 - 2005/8/1
N2 - Finely focused electron beam induced chemical vapour deposition with iron carbonyl gas, Fe(CO)5, was carried out at room temperature to fabricate desired-shape nanostructures such as dots, rods and rings. The as-formed structures exhibited an amorphous phase containing iron, carbon and oxygen elements in the whole volume and iron oxide nanocrystals existed near their surfaces. A post-deposition heat treatment at about 600 °C resulted in the transformation into a crystalline alpha-iron phase, while their shapes were maintained. The residual magnetic flux density Br of the as-formed and alpha-iron nanorods was quantitatively measured by electron holography after magnetization, showing that their Br values were similar to those of iron micro-powders, although the alpha-iron nanorod has a smaller Br value than the as-formed nanorod.
AB - Finely focused electron beam induced chemical vapour deposition with iron carbonyl gas, Fe(CO)5, was carried out at room temperature to fabricate desired-shape nanostructures such as dots, rods and rings. The as-formed structures exhibited an amorphous phase containing iron, carbon and oxygen elements in the whole volume and iron oxide nanocrystals existed near their surfaces. A post-deposition heat treatment at about 600 °C resulted in the transformation into a crystalline alpha-iron phase, while their shapes were maintained. The residual magnetic flux density Br of the as-formed and alpha-iron nanorods was quantitatively measured by electron holography after magnetization, showing that their Br values were similar to those of iron micro-powders, although the alpha-iron nanorod has a smaller Br value than the as-formed nanorod.
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U2 - 10.1088/0957-4484/16/8/057
DO - 10.1088/0957-4484/16/8/057
M3 - Article
AN - SCOPUS:21144442867
VL - 16
SP - 1321
EP - 1325
JO - Nanotechnology
JF - Nanotechnology
SN - 0957-4484
IS - 8
ER -