Fabrication of magnetic nanostructures using electron beam induced chemical vapour deposition

Masaki Takeguchi, Masayuki Shimojo, Kazuo Furuya

研究成果: Article査読

69 被引用数 (Scopus)

抄録

Finely focused electron beam induced chemical vapour deposition with iron carbonyl gas, Fe(CO)5, was carried out at room temperature to fabricate desired-shape nanostructures such as dots, rods and rings. The as-formed structures exhibited an amorphous phase containing iron, carbon and oxygen elements in the whole volume and iron oxide nanocrystals existed near their surfaces. A post-deposition heat treatment at about 600 °C resulted in the transformation into a crystalline alpha-iron phase, while their shapes were maintained. The residual magnetic flux density Br of the as-formed and alpha-iron nanorods was quantitatively measured by electron holography after magnetization, showing that their Br values were similar to those of iron micro-powders, although the alpha-iron nanorod has a smaller Br value than the as-formed nanorod.

本文言語English
ページ(範囲)1321-1325
ページ数5
ジャーナルNanotechnology
16
8
DOI
出版ステータスPublished - 2005 8 1
外部発表はい

ASJC Scopus subject areas

  • バイオエンジニアリング
  • 化学 (全般)
  • 材料科学(全般)
  • 材料力学
  • 機械工学
  • 電子工学および電気工学

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