Fabrication of Monocrystalline-Based Composite PZT Thin Film with Polycrystalline Crack Stopper Structure

Yu Katsumata, Shinya Yoshida, Shuji Tanaka

研究成果: Conference contribution

抄録

This paper reports on a new type of Pb(Zr, Ti)O3 (PZT) thin film, where monocrystalline (Mono) PZT is sectioned by narrow mesh-like polycrystalline (Poly) PZT. This Mono-Poly composite PZT thin film basically has unique characteristics of the Mono PZT such as reasonably high piezoelectric constant and low dielectric constant. In addition, accidental crack propagation in the Mono PZT is stopped by the Poly PZT. The motivation of this study is to solve the easy-to-fracture nature of single crystals, which is the case with Mono PZT. We successfully sputter-deposited the Mono-Poly composite thin film on a Si substrate covered with a patterned underlayer. Indentation tests demonstrated that the Poly PZT patterns prevented the crack propagation across Mono PZT areas. That is expected to improve the mechanical robustness of the entire film.

本文言語English
ホスト出版物のタイトル35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
出版社IEEE Computer Society
ページ543-546
ページ数4
ISBN(電子版)9781665409117
DOI
出版ステータスPublished - 2022
外部発表はい
イベント35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
継続期間: 2022 1月 92022 1月 13

出版物シリーズ

名前IEEE Symposium on Mass Storage Systems and Technologies
2022-January
ISSN(印刷版)2160-1968

Conference

Conference35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
国/地域Japan
CityTokyo
Period22/1/922/1/13

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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