Fabrication of nanostructures with different iron concentration by electron beam induced deposition with a mixture gas of iron carbonyl and ferrocene, and their magnetic properties

M. Takeguchi, M. Shimojo, K. Mitsuishi, M. Tanaka, R. Che, K. Furuya

研究成果: Article査読

14 被引用数 (Scopus)

抄録

Electron beam induced deposition (EBID) with a mixture gas of iron carbonyl and ferrocene was carried out to fabricate nanostructures with different iron concentrations in a chamber of a scanning electron microscope. The iron concentration was controlled by changing the ratio of partial pressure of iron carbonyl and ferrocene. Electron holography observation revealed that the remanent magnetic flux density B r values of the nanostructures were also changed depending on the iron concentration.

本文言語English
ページ(範囲)4532-4536
ページ数5
ジャーナルJournal of Materials Science
41
14
DOI
出版ステータスPublished - 2006 7 1
外部発表はい

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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