Fabrication of poly(9,9'-dioctylfluorene)-based nano- and microstructures by proton beam writing

Yuta Maeyoshi, Katsuyoshi Takano, Atsushi Asano, Hiromi Marui, Masaaki Omichi, Takahiro Satoh, Tomihiro Kamiya, Yasuyuki Ishii, Takeru Ohkubo, Masashi Koka, Wataru Kada, Masaki Sugimoto, Hiroyuki Nishikawa, Akinori Saeki, Shu Seki

研究成果: Article査読

1 被引用数 (Scopus)

抄録

A new and direct nano-microprocessing technique for poly(9,9'- dioctylfluorene) (PFO) films using proton beam writing (PBW) based on the crosslinking reaction of the polymer without a cross-linking agent was proposed. Not only the surface morphology but also structure size and shape on PFO films can be controlled from the nanometer to micrometer scale by adjusting the fluence of incident protons. Fabrication of three-dimensional PFO structures with an aspect ratio of 12 was successfully demonstrated by PBW with the adjustment of fluence at 3.5 x 10 6 ions/μm 2.

本文言語English
論文番号045201
ジャーナルJapanese Journal of Applied Physics
51
4 PART 1
DOI
出版ステータスPublished - 2012 4

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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