@inproceedings{2b2e65f65cd144c8ba8f68d4ff89b38c,
title = "Fabrication of polymer optical waveguides for the 1.5-μm band using focused proton beam",
abstract = "Proton beam writing (PBW) has attracted much attention recently as a next-generation micro-fabrication technology. It is a direct-drawing technique and does not need any masks to transfer micro-patterns to sample surfaces. In addition, the refractive index of a poly(methyl methacrylate) (PMMA) can be increased by proton-beam irradiation. In this study, we fabricated the first 1.5-μm-band single-mode, straight-line waveguides and Y-junction waveguides consisting of PMMA layers using the PBW technique.",
keywords = "1.5-μm band, Optical waveguide, PMMA, Proton beam writing, Single mode, Y junction",
author = "Kenta Miura and Yuki Machida and Masato Uehara and Hiromu Kiryu and Yusuke Ozawa and Tomoyuki Sasaki and Osamu Hanaizumi and Takahiro Satoh and Yasuyuki Ishii and Masashi Kohka and Katsuyoshi Takano and Takeru Ohkubo and Akiyoshi Yamazaki and Wataru Kada and Akihito Yokoyama and Tomihiro Kamiya and Hiroyuki Nishikawa",
note = "Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering, ISSS and AMDE 2010 ; Conference date: 09-12-2010 Through 10-12-2010",
year = "2012",
doi = "10.4028/www.scientific.net/KEM.497.147",
language = "English",
isbn = "9783037852859",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "147--150",
booktitle = "Silicon Science and Advanced Micro-Device Engineering II",
}