Fabrication of self-standing nanowires, nanodendrites, and nanofractal-like trees on insulator substrates with an electron-beam-induced deposition

M. Song, K. Mitsuishi, M. Tanaka, M. Takeguchi, M. Shimojo, K. Furuya

研究成果: Article査読

24 被引用数 (Scopus)

抄録

Self-standing tungsten nanowires, nanodendrites, and nanofractal-like trees were fabricated on insulator (Al2O3) substrates with a process of electron-beam-induced decomposition in a transmission electron microscope. The conditions for fabricating different morphologies are described. The fabricated structures are characterized with high-resolution transmission electron microscopy and X-ray energy-dispersive spectroscopy. A high concentration of tungsten and a high crystallinity of the structure are confirmed. The growth process is discussed, involving charges produced on the surface of the substrate and the behavior of precursor molecules under electron-beam irradiation. The formation of these structures is considered to relate to nanoscaled unevenness of the charge distribution on the surface of the substrate, movement of charges to the convex surface of the substrate, and accumulation of charges at the tips of the grown structures.

本文言語English
ページ(範囲)1431-1436
ページ数6
ジャーナルApplied Physics A: Materials Science and Processing
80
7
DOI
出版ステータスPublished - 2005 4 1
外部発表はい

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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