Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography

Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa

研究成果: Article

55 引用 (Scopus)

抄録

Three-dimensional (3D) periodic dielectric structures were recorded in a commercial photoresist SU-8 by exposure to intensity patterns created by five interfering coherent femtosecond Ti: sapphire laser pulses. Periodic symmetry of these patterns was controlled by the choice of mutual convergence angles of the beams as well as their phases. The fabricated structures are mechanically and chemically stable, well-connected frameworks of SU-8 regions in air; the smallest dimensions of SU-8 features are in the sub-micrometre range. The structures exhibit a high degree of long-range order across areas as large as 1 mm in cross-section.

元の言語English
記事番号250
ジャーナルNew Journal of Physics
8
DOI
出版物ステータスPublished - 2006 10 24
外部発表Yes

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photoresists
lithography
microstructure
fabrication
micrometers
sapphire
air
cross sections
symmetry
pulses
lasers

ASJC Scopus subject areas

  • Physics and Astronomy(all)

これを引用

Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography. / Kondo, Toshiaki; Juodkazis, Saulius; Mizeikis, Vygantas; Matsuo, Shigeki; Misawa, Hiroaki.

:: New Journal of Physics, 巻 8, 250, 24.10.2006.

研究成果: Article

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