Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography

Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa

研究成果: Article査読

59 被引用数 (Scopus)

抄録

Three-dimensional (3D) periodic dielectric structures were recorded in a commercial photoresist SU-8 by exposure to intensity patterns created by five interfering coherent femtosecond Ti: sapphire laser pulses. Periodic symmetry of these patterns was controlled by the choice of mutual convergence angles of the beams as well as their phases. The fabricated structures are mechanically and chemically stable, well-connected frameworks of SU-8 regions in air; the smallest dimensions of SU-8 features are in the sub-micrometre range. The structures exhibit a high degree of long-range order across areas as large as 1 mm in cross-section.

本文言語English
論文番号250
ジャーナルNew Journal of Physics
8
DOI
出版ステータスPublished - 2006 10 24
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(全般)

フィンガープリント

「Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル