TY - JOUR
T1 - Fabrication of three-dimensional photonic crystals by femtosecond laser interference
AU - Matsuo, Shigeki
AU - Kondo, Toshiaki
AU - Juodkazis, Saulius
AU - Mizeikis, Vygantas
AU - Misawa, Hiroaki
N1 - Publisher Copyright:
© 2002 SPIE.
PY - 2002/4/25
Y1 - 2002/4/25
N2 - We describe a novel microfabrication method based on interference of several coherent laser pulses in photosensitive media. The method allows to transform the periodic multidimensional interference patterns into periodic modulation of dielectric properties of the material, and is therefore potentially suitable for the photonic crystal fabrication in materials like photoresists, photosensitive glasses, and others. We have fabricated one, two, and three-dimensional photonic crystals with different lattices and sub-micrometer periods. The fabricated structures have high structural quality, as evidenced by confocal and scanning electron microscopies. Furthermore, using numerical simulations we explore the possibilities to obtain body-centered-cubic and diamond photonic crystal lattices by varying optical phases of the interfering beams. Numerical simulations are also used to reveal photonic bandgap properties of some 2D phhotonic crystals, fabricated using this technique.
AB - We describe a novel microfabrication method based on interference of several coherent laser pulses in photosensitive media. The method allows to transform the periodic multidimensional interference patterns into periodic modulation of dielectric properties of the material, and is therefore potentially suitable for the photonic crystal fabrication in materials like photoresists, photosensitive glasses, and others. We have fabricated one, two, and three-dimensional photonic crystals with different lattices and sub-micrometer periods. The fabricated structures have high structural quality, as evidenced by confocal and scanning electron microscopies. Furthermore, using numerical simulations we explore the possibilities to obtain body-centered-cubic and diamond photonic crystal lattices by varying optical phases of the interfering beams. Numerical simulations are also used to reveal photonic bandgap properties of some 2D phhotonic crystals, fabricated using this technique.
KW - Diffractive beam splitter
KW - Femtosecond laser
KW - Laser interference
KW - Multi-photon process
KW - Photonic crystal
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U2 - 10.1117/12.463891
DO - 10.1117/12.463891
M3 - Conference article
AN - SCOPUS:36048932022
SN - 0277-786X
VL - 4655
SP - 327
EP - 334
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
T2 - Photonic Bandgap Materials and Devices 2002
Y2 - 19 January 2002 through 25 January 2002
ER -