We describe a novel microfabrication method based on interference of several coherent laser pulses in photosensitive media. The method allows to transform the periodic multidimensional interference patterns into periodic modulation of dielectric properties of the material, and is therefore potentially suitable for the photonic crystal fabrication in materials like photoresists, photosensitive glasses, and others. We have fabricated one, two, and three-dimensional photonic crystals with different lattices and sub-micrometer periods. The fabricated structures have high structural quality, as evidenced by confocal and scanning electron microscopies. Furthermore, using numerical simulations we explore the possibilities to obtain body-centered-cubic and diamond photonic crystal lattices by varying optical phases of the interfering beams. Numerical simulations are also used to reveal photonic bandgap properties of some 2D phhotonic crystals, fabricated using this technique.
|ジャーナル||Proceedings of SPIE - The International Society for Optical Engineering|
|出版ステータス||Published - 2002 4月 25|
|イベント||Photonic Bandgap Materials and Devices 2002 - San Jose, United States|
継続期間: 2002 1月 19 → 2002 1月 25
ASJC Scopus subject areas
- コンピュータ サイエンスの応用