Fabrication processes of soi structure for optical nonreciprocal devices

Salinee Choowitsakunlert, Kenji Takagiwa, Takuya Kobashigawa, Nariaki Hosoya, Rardchawadee Silapunt, Hideki Yokoi

研究成果: Conference contribution

抄録

Fabrication processes of a magneto-optic waveguide with a Si guiding layer for an optical isolator employing a nonreciprocal guided-radiation mode conversion are investigated. The optical isolator is constructed on a silicon-on-insulator (SOI) structure. The magneto-optic waveguide is fabricated by bonding the Si guiding layer with a cerium-substituted yttrium iron garnet (Ce: YIG). The relationship of waveguide geometric parameters is determined at a wavelength of 1550 nm. The results show that larger tolerance for isolator operation can be obtained at smaller gaps between Si and Ce: YIG. Bonding processes including photosensitive adhesive bonding and surface activated bonding are then compared. It is found that the surface activated bonding process is easier to control and more promising than the photosensitive adhesive bonding.

本文言語English
ホスト出版物のタイトルAdvanced Materials and Engineering Materials VII
編集者Peng Sheng Wei
出版社Trans Tech Publications Ltd
ページ107-112
ページ数6
ISBN(印刷版)9783035713718
DOI
出版ステータスPublished - 2018
イベント7th International Conference on Advanced Materials and Engineering Materials, ICAMEM 2018 - Bangkok, Thailand
継続期間: 2018 5 172018 5 18

出版物シリーズ

名前Key Engineering Materials
777 KEM
ISSN(印刷版)1013-9826
ISSN(電子版)1662-9795

Other

Other7th International Conference on Advanced Materials and Engineering Materials, ICAMEM 2018
国/地域Thailand
CityBangkok
Period18/5/1718/5/18

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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