A new type of fatigue testing machine for micro-sized specimens for MEMS applications has been developed. This fatigue testing machine consists of a magnetostrictive actuator which is able to impart small displacements to a specimen upto 20 μm with resolution of 5 nm. The actuator is connected to a metal shaft and a diamond tip of 5 μm in radius is attached to the end of the shaft. Small displacements are applied to the specimen through the diamond tip. This makes it possible to construct a high stiffness loading fixture. The magnitude of load applied to the specimen is measured by a strain gauge type load cell with a load resolution of 10 μN. The specimen stage and load cell can be moved to adjust the loading position precisely by a stepping motor at a translation resolution of 0.1 μm. Cantilever beam type specimens with dimensions of 10 × 12 × 50 μm3 were prepared from a Ni-P amorphous thin film by focused ion beam machining. Very small cyclic load (ΔP = 0.1 - 40 mN) was able to be applied to the specimen successfully. This machine appears to be promising for evaluation of fatigue properties for micro-sized specimens for MEMS applications.
|ジャーナル||Materials Research Society Symposium - Proceedings|
|出版ステータス||Published - 2000 12 1|
|イベント||Materials Science of Microelectromechanical Systems (MEMS) Devices II - Boaton, MA, USA|
継続期間: 1999 11 29 → 1999 12 1
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