FE-B-NB-ND magnetic metallic glass thin film for MEMS/NEMS structure

Engineering & Materials Science

• NEMS 100%
• Metallic glass 95%
• Thin films 64%
• MEMS 63%
• Magnetic properties 55%
• Micromachining 27%
• Harvesters 26%
• Surface morphology 25%
• Residual stresses 19%
• Elastic moduli 19%
• Hardness 17%
• Fabrication 16%

Physics & Astronomy

• metallic glasses 69%
• microelectromechanical systems 66%
• thin films 35%
• magnetic properties 31%
• micromachining 25%
• residual stress 21%
• modulus of elasticity 18%
• hardness 17%
• vibration 14%
• fabrication 13%
• energy 6%

Chemical Compounds

• Metallic Glass 89%
• Magnetic Property 36%
• Micromachining 31%
• Surface Structure 22%
• Liquid Film 11%
• Energy 10%