Fe-B-Nd-Nb metallic glass thin films for microelectromechanical systems

T. A. Phan, H. Oguchi, M. Hara, M. Shikida, H. Hida, T. Ando, K. Sato, H. Kuwano

研究成果: Article査読

10 被引用数 (Scopus)

抄録

In the present study, we investigate the mechanical properties, residual stress, and microprocessing compatibility of Fe67.5B 22.5Nd6.3Nb3.7 metallic glass thin films (Fe-MGTFs). The mechanical properties are measured using a specially designed microtensile tester. The fracture toughness of the Fe-MGTF (6.36 MPa × m1/2) is more than twice that of Si, and the highest among the thin films developed for microelectromechanical systems (MEMS) to this point. In addition, the fabrication of freestanding microcantilevers illustrates the low residual stress and high microprocessing compatibility of Fe-MGTFs. The present study verifies the great potential of Fe-MGTFs for use in MEMS.

本文言語English
論文番号181901
ジャーナルApplied Physics Letters
103
18
DOI
出版ステータスPublished - 2013 10月 28
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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