Feasibility study of ultrasonic biometrics based on finger vessel imaging by epitaxial-PZT/Si piezoelectric micromachined ultrasonic transducer

Ziyi Liu, Shinya Yoshida, Toshiaki Horie, Shoji Okamoto, Ryoichi Takayama, Shuji Tanaka

研究成果: Article査読

9 被引用数 (Scopus)

抄録

In this study, we demonstrated a potential usability of a piezoelectric micromachined ultrasonic transducer (pMUT) for a high-performance body-coupled ultrasonic imager based on an epitaxial lead zirconate titanate (Epi-PZT) thin film. A finger vessel biometrics was proposed as one of its applications. At first, transmitting abilities and receiving sensitivities of the single-element pMUT based on Epitaxial-PZT (Epi-PZT) and polycrystalline-PZT (Poly-PZT) were evaluated as a fundamental study. It was experimentally verified that the Epi-PZT was a preferable material for a higher performance pMUT. Then, the linear array driven by a commercially-available pulser board was constructed, and successfully formed a focused ultrasonic beam. Finally, we demonstrated the ultrasonic imaging of a polydimethylsiloxane-based phantom by using the Epi-PZT pMUT array. We believe this achievement is a great step to realize the finger vessel biometric by pMUT.

本文言語English
論文番号112145
ジャーナルSensors and Actuators, A: Physical
312
DOI
出版ステータスPublished - 2020 9月 1
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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