TY - JOUR
T1 - Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH
AU - Matsuo, Shigeki
AU - Sumi, Haruki
AU - Kiyama, Satoshi
AU - Tomita, Takuro
AU - Hashimoto, Shuichi
PY - 2009/9/30
Y1 - 2009/9/30
N2 - A femtosecond laser-assisted etching technique was applied to Pyrex glass, a kind of borosilicate glass, to perform removal processing with three-dimensional arbitrarity in design and micrometer-order spatial resolution. An aqueous solution of potassium hydroxide (KOH) was adopted as a highly selective etchant. The rate and selectivity of etching were evaluated from in situ images, and fabrication of three-dimensional microchannels was demonstrated.
AB - A femtosecond laser-assisted etching technique was applied to Pyrex glass, a kind of borosilicate glass, to perform removal processing with three-dimensional arbitrarity in design and micrometer-order spatial resolution. An aqueous solution of potassium hydroxide (KOH) was adopted as a highly selective etchant. The rate and selectivity of etching were evaluated from in situ images, and fabrication of three-dimensional microchannels was demonstrated.
KW - Femtosecond laser-assisted etching
KW - Potassium hydroxide (KOH)
KW - Pyrex glass
KW - Selective etching
UR - http://www.scopus.com/inward/record.url?scp=70349440775&partnerID=8YFLogxK
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U2 - 10.1016/j.apsusc.2009.04.065
DO - 10.1016/j.apsusc.2009.04.065
M3 - Article
AN - SCOPUS:70349440775
SN - 0169-4332
VL - 255
SP - 9758
EP - 9760
JO - Applied Surface Science
JF - Applied Surface Science
IS - 24
ER -