Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH

Physics & Astronomy

• borosilicate glass 73%
• aqueous solutions 59%
• etching 48%
• potassium hydroxides 47%
• etchants 39%
• glass 37%
• microchannels 33%
• selectivity 30%
• micrometers 29%
• lasers 28%
• spatial resolution 25%
• fabrication 19%

Engineering & Materials Science

• Femtosecond lasers 100%
• Etching 69%
• Glass 51%
• Potassium hydroxide 48%
• Borosilicate glass 46%
• Microchannels 35%
• Fabrication 23%

Chemical Compounds

• Etching 57%
• Glass 44%
• Borosilicate Glass 40%
• Potassium Hydroxide 35%
• Aqueous Solution 33%