Femtosecond laser assisted etching of quartz: Microstructuring from inside

S. Matsuo, Y. Tabuchi, T. Okada, S. Juodkazis, H. Misawa

研究成果: Article査読

35 被引用数 (Scopus)

抄録

In quartz crystal substrates, microchannels were made by femtosecond laser assisted etching, i.e., irradiation of focused femtosecond laser pulses followed by wet etching. By the use of wet etching, the laser irradiated region was selectively etched out, and a microchannel was formed inside the quartz substrate. The laser irradiated region was found to be amorphous by transmission electron microscopy. Anisotropy in the etching rate inside the quartz was observed.

本文言語English
ページ(範囲)99-102
ページ数4
ジャーナルApplied Physics A: Materials Science and Processing
84
1-2
DOI
出版ステータスPublished - 2006 7 1
外部発表はい

ASJC Scopus subject areas

  • 化学 (全般)
  • 材料科学(全般)

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