Femtosecond laser assisted etching of quartz: Microstructuring from inside

S. Matsuo, Y. Tabuchi, T. Okada, S. Juodkazis, H. Misawa

研究成果: Article

31 引用 (Scopus)

抜粋

In quartz crystal substrates, microchannels were made by femtosecond laser assisted etching, i.e., irradiation of focused femtosecond laser pulses followed by wet etching. By the use of wet etching, the laser irradiated region was selectively etched out, and a microchannel was formed inside the quartz substrate. The laser irradiated region was found to be amorphous by transmission electron microscopy. Anisotropy in the etching rate inside the quartz was observed.

元の言語English
ページ(範囲)99-102
ページ数4
ジャーナルApplied Physics A: Materials Science and Processing
84
発行部数1-2
DOI
出版物ステータスPublished - 2006 7 1
外部発表Yes

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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