Femtosecond laser-assisted three-dimensional microfabrication in silica

Andrius Marcinkevičius, Saulius Juodkazis, Mitsuru Watanabe, Masafumi Miwa, Shigeki Matsuo, Hiroaki Misawa, Junji Nishii

研究成果: Article

553 引用 (Scopus)

抜粋

We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps: (i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10 μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10-μm-diameter channels in a 100-μm-thick silica slab).

元の言語English
ページ(範囲)277-279
ページ数3
ジャーナルOptics Letters
26
発行部数5
DOI
出版物ステータスPublished - 2001 3 1

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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  • これを引用

    Marcinkevičius, A., Juodkazis, S., Watanabe, M., Miwa, M., Matsuo, S., Misawa, H., & Nishii, J. (2001). Femtosecond laser-assisted three-dimensional microfabrication in silica. Optics Letters, 26(5), 277-279. https://doi.org/10.1364/OL.26.000277