Femtosecond laser-induced ripple structures in semiconductor materials

Takuro Tomita, Keita Kinoshita, Toshiaki Murai, Yasuhiro Fukumori, Shigeki Matsuo, Shuichi Hashimoto

研究成果: Article

1 引用 (Scopus)

抜粋

Femtosecond laser-induced ripple structures were fabricated on semiconductor materials such as silicon and silicon carbide. While a coarse ripple was observed on both materials under the proper irradiation conditions, a fine ripple was observed only on the silicon carbide. The cross-sectional profile of ripple structure was examined by scanning electron microscopy with sliced or tilted sam-ples. Based on the experimental observations, the formation mechanism of the ripple structure was discussed.

元の言語English
ページ(範囲)141-145
ページ数5
ジャーナルJournal of Laser Micro Nanoengineering
2
発行部数2
DOI
出版物ステータスPublished - 2007 6 1
外部発表Yes

ASJC Scopus subject areas

  • Instrumentation
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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