Femtosecond laser-induced surface patterning on 4H-SiC

Takuro Tomita, Ryota Kumai, Keita Kinoshita, Shigeki Matsuo, Shuichi Hashimto, Hirokazu Nagase, Makoto Nakajima, Tohru Suemoto

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

Femtosecond laser-induced periodic structures, so-called "ripples", were systematically studied under various incident laser wavelengths and polarization properties. The effect of the excitation wavelength on the period of ripples was investigated from the infrared to ultraviolet laser pulses. The period of ripple on 4H-SiC correlated remarkably with the wavelength of the incident laser beam. This means that the period of ripples can be controlled by the wavelength of the laser beam. The irradiation of circular polarized femtosecond laser beam produced dot-like structures with the mean spacing of about 200 nm on the surface of 4H-SiC. The effect of initial surface roughness was also studied.

本文言語English
ホスト出版物のタイトルSilicon Carbide and Related Materials 2007
編集者Takashi Fuyuki, Hajime Okumura, Kenji Fukuda, Shin-ichi Nishizawa, Tsunenobu Kimoto, Akira Suzuki
出版社Trans Tech Publications Ltd
ページ879-882
ページ数4
ISBN(印刷版)9780878493579
出版ステータスPublished - 2009 1月 1
外部発表はい
イベント12th International Conference on Silicon Carbide and Related Materials, ICSCRM 2007 - Otsu, Japan
継続期間: 2007 10月 142007 10月 19

出版物シリーズ

名前Materials Science Forum
600-603
ISSN(印刷版)0255-5476

Conference

Conference12th International Conference on Silicon Carbide and Related Materials, ICSCRM 2007
国/地域Japan
CityOtsu
Period07/10/1407/10/19

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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