Femtosecond laser-induced surface patterning on 4H-SiC

Takuro Tomita, Ryota Kumai, Keita Kinoshita, Shigeki Matsuo, Shuichi Hashimto, Hirokazu Nagase, Makoto Nakajima, Tohru Suemoto

研究成果: Conference contribution

2 引用 (Scopus)

抜粋

Femtosecond laser-induced periodic structures, so-called "ripples", were systematically studied under various incident laser wavelengths and polarization properties. The effect of the excitation wavelength on the period of ripples was investigated from the infrared to ultraviolet laser pulses. The period of ripple on 4H-SiC correlated remarkably with the wavelength of the incident laser beam. This means that the period of ripples can be controlled by the wavelength of the laser beam. The irradiation of circular polarized femtosecond laser beam produced dot-like structures with the mean spacing of about 200 nm on the surface of 4H-SiC. The effect of initial surface roughness was also studied.

元の言語English
ホスト出版物のタイトルSilicon Carbide and Related Materials 2007
編集者Takashi Fuyuki, Hajime Okumura, Kenji Fukuda, Shin-ichi Nishizawa, Tsunenobu Kimoto, Akira Suzuki
出版者Trans Tech Publications Ltd
ページ879-882
ページ数4
ISBN(印刷物)9780878493579
出版物ステータスPublished - 2009 1 1
イベント12th International Conference on Silicon Carbide and Related Materials, ICSCRM 2007 - Otsu, Japan
継続期間: 2007 10 142007 10 19

出版物シリーズ

名前Materials Science Forum
600-603
ISSN(印刷物)0255-5476

Conference

Conference12th International Conference on Silicon Carbide and Related Materials, ICSCRM 2007
Japan
Otsu
期間07/10/1407/10/19

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

フィンガープリント Femtosecond laser-induced surface patterning on 4H-SiC' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用

    Tomita, T., Kumai, R., Kinoshita, K., Matsuo, S., Hashimto, S., Nagase, H., Nakajima, M., & Suemoto, T. (2009). Femtosecond laser-induced surface patterning on 4H-SiC. : T. Fuyuki, H. Okumura, K. Fukuda, S. Nishizawa, T. Kimoto, & A. Suzuki (版), Silicon Carbide and Related Materials 2007 (pp. 879-882). (Materials Science Forum; 巻数 600-603). Trans Tech Publications Ltd.