Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals

Toshiaki Kondo, Shigeki Matsuo, Saulius Juodkazis, Hiroaki Misawa

研究成果: Article

291 引用 (Scopus)

抜粋

A simple optical interference method to fabricate microperiodic structures was demonstrated. Femtosecond laser pulse was split by a diffractive beam splitter and overlapped with two lenses. Temporal overlap of the split femtosecond pulses, which requires 10 μm order accuracy in optical path lengths, was automatically achieved by this optical setup. One-, two-, and three-dimensional periodic microstructures with micrometer-order periods were fabricated using this method.

元の言語English
ページ(範囲)725-727
ページ数3
ジャーナルApplied Physics Letters
79
発行部数6
DOI
出版物ステータスPublished - 2001 8 6

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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