Femtosecond laser microfabrication of periodic structures using a microlens array

S. Matsuo, S. Juodkazis, H. Misawa

研究成果: Review article査読

97 被引用数 (Scopus)

抄録

A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.

本文言語English
ページ(範囲)683-685
ページ数3
ジャーナルApplied Physics A: Materials Science and Processing
80
4
DOI
出版ステータスPublished - 2005 2 1
外部発表はい

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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