A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.
|ジャーナル||Applied Physics A: Materials Science and Processing|
|出版物ステータス||Published - 2005 2 1|
ASJC Scopus subject areas
- Materials Science(all)