Fluorinated Interlayer Dielectric Films in ULSI Multilevel Interconnections

T. Homma

研究成果: Article

元の言語English
ジャーナルE-MRS Spring Meeting Abstracts（A-IV.1）
出版物ステータスPublished - 1994 5 24

これを引用

Fluorinated Interlayer Dielectric Films in ULSI Multilevel Interconnections. / Homma, T.

：: E-MRS Spring Meeting Abstracts（A-IV.1）, 24.05.1994.

研究成果: Article

Homma, T 1994, 'Fluorinated Interlayer Dielectric Films in ULSI Multilevel Interconnections', E-MRS Spring Meeting Abstracts（A-IV.1）.
Homma T. Fluorinated Interlayer Dielectric Films in ULSI Multilevel Interconnections. E-MRS Spring Meeting Abstracts（A-IV.1）. 1994 5 24.
Homma, T. / Fluorinated Interlayer Dielectric Films in ULSI Multilevel Interconnections. ：: E-MRS Spring Meeting Abstracts（A-IV.1）. 1994.
@article{b48a475ea92f40c48ae358e9b2fc5952,
title = "Fluorinated Interlayer Dielectric Films in ULSI Multilevel Interconnections",
author = "T. Homma",
year = "1994",
month = "5",
day = "24",
language = "English",
journal = "E-MRS Spring Meeting Abstracts（A-IV.1）",

}

TY - JOUR

T1 - Fluorinated Interlayer Dielectric Films in ULSI Multilevel Interconnections

AU - Homma, T.

PY - 1994/5/24

Y1 - 1994/5/24

M3 - Article

JO - E-MRS Spring Meeting Abstracts（A-IV.1）

JF - E-MRS Spring Meeting Abstracts（A-IV.1）

ER -