TY - JOUR
T1 - Formation mechanisms of paramagnetic defect centers induced by excimer lasers, gamma rays, and mechanical fracturing in amorphous SiO2
AU - Nishikawa, Hiroyuki
AU - Watanabe, Eiki
AU - Ito, Daisuke
AU - Ohki, Yoshimichi
PY - 1997/1/1
Y1 - 1997/1/1
N2 - The formation mechanisms of paramagnetic defect centers in amorphous SiO2 induced by excimer lasers, 60Co γ rays, and mechanical fracturing were investigated. Correlation between the paramagnetic defect centers and their precursors introduced during manufacture is discussed for the cases of excimer lasers and γ rays. For the case of mechanical fracturing, formation of strained Si-O-Si bonds as well as paramagnetic defects is examined. The mechanism of laser- or γ-ray-induced paramagnetic defect centers is compared with that of fracture-induced centers.
AB - The formation mechanisms of paramagnetic defect centers in amorphous SiO2 induced by excimer lasers, 60Co γ rays, and mechanical fracturing were investigated. Correlation between the paramagnetic defect centers and their precursors introduced during manufacture is discussed for the cases of excimer lasers and γ rays. For the case of mechanical fracturing, formation of strained Si-O-Si bonds as well as paramagnetic defects is examined. The mechanism of laser- or γ-ray-induced paramagnetic defect centers is compared with that of fracture-induced centers.
KW - Amorphous SiO
KW - Electron spin resonance
KW - Excimer laser: Co γ ray
KW - Mechanical stress
KW - Optical absorption
KW - Paramagnetic defect center
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U2 - 10.1002/(SICI)1520-6416(19971130)121:3<9::AID-EEJ2>3.0.CO;2-8
DO - 10.1002/(SICI)1520-6416(19971130)121:3<9::AID-EEJ2>3.0.CO;2-8
M3 - Article
AN - SCOPUS:0031269639
SN - 0424-7760
VL - 121
SP - 9
EP - 19
JO - Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi)
JF - Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi)
IS - 3
ER -